Surface quality control with an interference profilometer
Contactless interference three-dimensional profilometer "Micron-alpha" (Fig. 1) is based on the production-type interferometer MII-4 with a new electronic and mechanical control system, digital video system, and software. The device allows us to build a two- and three-dimensional surface image, to obtain surface relief quantitative characteristics, to observe interferential pictures, to carry out metallographic research.
Specifications:
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Scanning field (X,Y), mkm |
50-350 |
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Horizontal resolution (X,Y), mkm |
0,15 |
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Vertical resolution (Z), nm |
5 |
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Measurement on vertical (Z), mkm |
up to 50 |
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Registration time, min |
0,1-3 |
The measurement process is fully automated; a convenient interface is used for control. The device software is compatible with a PC class computer and it works in Windows XP.
Micron-alpha" can be successfully used for control of fiber-optic connectors geometrical parameters.
It is required to control the form of optic surfaces when networks production and assembling so that to provide reliable work and parameters stability for fiber-optic networks during the whole operating life. The contact in connectors (ferula) is carried out on those optic surfaces. Optic fiber diameter equals 126 mkm.
Resolution obtained on "Micron-alpha" image is quite high. Together with a general formula of the connectors flat end it allows us to see rather fine details of the surface relief (Fig. 2). Geometrical parameters of the surface are determined after its form specified in digital type. The parameters are as follows: radius of polish, top displacement, fiber embedment, fractures and other defects availability. Obtained parameters are compared with ultimate values input into computer in advance. A conclusion on the surface quality is made up automatically whether it corresponds to required demands.
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Fig. 2. Profilogram (a) and 3D image (b) of the fiber-optic connector
"Micron-alpha" use can significantly increase productivity and diminish costs when integral microchip quality control (Fig. 3). Microchip quality control consists of accurate measurement and visual check of the main geometrical parameters with the further use of obtained information for the purpose of technological mode correction.
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Fig.3. Profilogram () and 3D topography of the silicon mono crystal base and corresponding introduction for the power amplifier (c, d)
"Micron-alpha" technical feasibility allows us to carry out the CD-ROM disks surface measurements (Fig. 4). The pits sizes for those CD-ROMs are strictly specified and made up half-wavelength of a laser light emitting diode (0,4 mkm).
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Fig. 4. Profilograms () and 3D topography (b) of the CD-ROM disk part
"Micron-alpha" can be used for the surface state control for products with rigid requirements towards micro smoothness parameters. For example, polish quality, porosity, and hardness of dental materials is determined in such a way (Fig. 5)
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Fig. 5. Three-dimensional images and corresponding profilograms of dental materials: "ESTA" (a); "Valux Plus" 3M ESPE (b)
Use of contactless interference profilometer "Micron-alpha" is quite challenging when contact testing of materials surface using nano-indentation (Depth Sensing Indention) and nano-sclerometry (Scratch Testing) techniques. Nano testers from leading manufacturers are equipped with atomic-force microscope so that to obtain an indention image. This fact makes equipment complicated and significantly increases its cost.
"Micron-alpha" use allows us to quantify the restored indention depth in real time, to calculate volume of the material forced out, to obtain two- and three-dimensional topography of testing surface for materials with different mechanical properties (Fig. 6).
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Fig. 6. 3D topography of indention (a) and scratch (d) on the steel surface, profilogram (c) and 3D topography (d) of ceramics.
The thin films of different types and properties are widely used in present-day optic-electronic devices, in effective protective coatings. Special testing, including a microsection method, is carried out to determine wearing resistance, adhesion clutch, thickness of those coatings. Upon that visual information of wear surface is required. This information can be successfully obtained using contactless profilometer "Micron-alpha" (Fig. 7).
Fig.7. Profilogram (a), 3D topography (b) of a base wear surface bound and amorphous silicon carbide (SiC:H) film after testing on a microsection
In the summary, the interference profilometer "Micron-alpha" can be successfully used in different areas of production and scientific research where the information about the surface relief is essential.
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Fig. 6. 3D topography of indention (a) and scratch (d) on the steel surface, profilogram (c) and 3D topography (d) of ceramics.
The thin films of different types and properties are widely used in present-day optic-electronic devices, in effective protective coatings. Special testing, including a microsection method, is carried out to determine wearing resistance, adhesion clutch, thickness of those coatings. Upon that visual information of wear surface is required. This information can be successfully obtained using contactless profilometer "Micron-alpha" (Fig. 7).
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Fig.7. Profilogram (a), 3D topography (b) of a base wear surface bound and amorphous silicon carbide (SiC:H) film after testing on a microsection
In the summary, the interference profilometer "Micron-alpha" can be successfully used in different areas of production and scientific research where the information about the surface relief is essential.